CHRISTOPHE VALLEE

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Courtesy Professor

United States

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Recent Grants

Grant: Close

ASD on EUV resists

Open Date: 2021-01-01

Close Date: 2024-12-01

Grant: Close

TEL Innovation Scientist award

Open Date: 2020-09-01

Close Date: 2025-08-01

Articles (10)

Year:

2023

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2023

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2022

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2022

Year:

2022

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2021

Year:

2021

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2021

Year:

2021

Year:

2021

Collaborators (3)

Julien Bachmann

GERMANY

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Tobias Vogel

Technische Universität Darmstadt

GERMANY

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Woojin Jeon

Kyungpook National University

SOUTH KOREA

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CHRISTOPHE VALLEE

Research Interests

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Contact this professor

Recent Grants

Articles (10)

Conductive TiN thin films grown by plasma-enhanced atomic layer deposition: Effects of N-sources and thermal treatments

Investigation into the effect of a PECVD-deposited SiOx chamber coating on the selective, radical-based NF3 etching of TaN with respect to BEOL low-k

Area selective deposition using alternate deposition and etch super-cycle strategies

Area selective deposition using alternate deposition and etch super-cycle strategies

Surface oxidation phenomena in Ge-rich GeSbTe alloys and N doping influence for Phase-Change Memory applications

An Empirical Investigation on the Effect of Oxygen Vacancy in ZrO<sub>2</sub>Thin Film on the Frequency-Dependent Capacitance Degradation in the Metal-Insulator-Metal Capacitor

Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO<sub>2</sub>

Defect-Induced Phase Transition in Hafnium Oxide Thin Films: Comparing Heavy Ion Irradiation and Oxygen-Engineering Effects

Innovative Low-Power Self-Nanoconfined Phase-Change Memory

Low temperature Topographically Selective Deposition by Plasma Enhanced Atomic Layer Deposition with ion bombardment assistance

Collaborators (3)

Julien Bachmann

Tobias Vogel

Woojin Jeon

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