Diederik Depla

Professor

Ghent University

Belgium

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Diederik Depla is a Professor at Ghent University in Belgium. His research focuses on reactive magnetron sputtering, including mechanisms of feedback control, the role of chemisorption, and the impact of deposition conditions on thin film properties. Recent publications include studies on sputter yields, phase composition, and chemical stability of various materials.

Articles (15)

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2025

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2024

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2024

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2021

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2021

Collaborators (2)

Marcus Hans

RWTH Aachen University

GERMANY

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Philippe Smet

Full professor

Ghent University

BELGIUM

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Diederik Depla

Research Interests

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About

Articles (15)

Convergence during feedback controlled reactive magnetron sputtering: Mechanisms and classification

Floating potential probes for process control during reactive magnetron sputtering

Note on the low deposition rate during reactive magnetron sputtering

Phase composition of sputter deposited tungsten thin films

Calculation of oxide sputter yields

On the role of chemisorption in the formation of the target surface compound layer during reactive magnetron sputtering

Influence of chemisorption on the double hysteresis phenomenon during reactive sputtering

Linking simulated polycrystalline thin film microstructures to physical vapor deposition conditions

Effect of Growth Temperature and Atmosphere Exposure Time on Impurity Incorporation in Sputtered Mg, Al, and Ca Thin Films

Chemical Stability of Sputter Deposited Silver Thin Films

A computational study of the double hysteresis phenomenon during reactive sputtering

Plasma-enhanced atomic layer deposition: Correlating O2 plasma parameters and species to blister formation and conformal film growth

Influence of Impurities on the Front Velocity of Sputter Deposited Al/CuO Thermite Multilayers

Understanding residual stress in thin films: Analyzing wafer curvature measurements for Ag, Cu, Ni, Fe, Ti, and Cr with a kinetic model

Nitride formation during reactive sputter deposition of multi-principal element alloys in argon/nitrogen mixtures

Collaborators (2)

Marcus Hans

Philippe Smet

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