František Uherek

Surface plasmon resonance (SPR)-based sensors have attracted huge interest due to their ability to provide real-time sensing of a wide range of quantities, while still boasting high sensitivity, low cost, and electromagnetic immunity. Among various types of these sensors, waveguide-based sensors show great promise in terms of integrability into more complex circuits while still maintaining similar sensitivity and versatility as their stand-alone counterparts. This paper presents the results of investigation based on design and simulation of optimal parameters for multimode SPR-based waveguide sensor sensitive to any commonly used liquid analytes. The sensitivity for a wider range of analytes is achieved by utilisation of SiON material platform because refractive index adjustability of SiON offers a way to tailor sensor’s sensitivity to exact applications and analytes. One of the research goals in this work was to show that multi-mode waveguides may be suitable for such sensors with comparable sensitivity and higher transmission rates as single-mode waveguides. To showcase design possibilities, two variations with the same design and material’s refractive index adjustment only were investigated, and their optimal parameters have been found. Sensitivity for all commonly used liquid analytes was validated, with sensitivity rising to 1400 nm/RIU for label-free refractive index sensing, even without the use of any sensitivity-enhancing structures.