Jaeseok Bae

Professional

South Korea

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Articles (4)

Year:

2023

Year:

2021

Year:

2021

Year:

2020

Collaborators (3)

Youichi Bitou

National Institute of Advanced Industrial Science and Technology (AIST)

JAPAN

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Jungjae Park

Adjunct professor

University of Science and Technology

SOUTH KOREA

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Jonghan Jin

Professor / Chief Major Professor

University of Science and Technology

SOUTH KOREA

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Jaeseok Bae

Research Interests

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Articles (4)

Thickness measurements and uncertainty evaluation of a multilayer thin-film sample using auxiliary single-layer samples

Precise measurement of the thickness of silicon wafers by double-sided interferometer and bilateral comparison

Optical method for simultaneous thickness measurements of two layers with a significant thickness difference

A novel method for simultaneous measurement of thickness, refractive index, bow, and warp of a large silicon wafer using a spectral-domain interferometer

Collaborators (3)

Youichi Bitou

Jungjae Park

Jonghan Jin

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