Michaël Ménard

Assistant Professor

École de technologie supérieure

Canada

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Michaël Ménard is an Assistant Professor at École de technologie supérieure in Canada. His research primarily focuses on electrostatic MEMS and silicon nitride photonics, with recent articles exploring topics such as phase shifters, fiber-to-chip couplers, and rotary MOEMS switches. He is also involved in the design of advanced photonic devices, including (de)multiplexers and integrated MEMS switches.

Articles (24)

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2025

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2021

Collaborators (1)

Frederic Nabki

Professor

École de technologie supérieure

CANADA

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Michaël Ménard

Research Interests

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Articles (24)

Electrostatic MEMS Phase Shifter for SiN Photonic Integrated Circuits

Inverse-Designed 90-Degree Silicon Nitride Bends for the C Band

Inverse design fiber-to-chip couplers for the O- and C-bands

Reconfigurable electrostatically actuated 1 × 5 rotary MOEMS switch

A Compact and Broadband Splitter to Interface Between Strip and Slot Waveguides

Broadband SiN Interleaver With a Ring Assisted MZI Using a Tapered MMI Coupler

An Integrated 1 × 5 MEMS Silicon Nitride Photonics Switch

Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors

A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment

High-performance silicon nitride (de)multiplexer based on ring-assisted MZIs

Inverse-designed silicon nitride reflectors

Broadband 1 x 4 Silicon Nitride Photonic Switch Fabricated on a Hybrid Electrothermal and Electrostatic MEMS Platform

Two-axis MEMS positioner for waveguide alignment in silicon nitride photonic integrated circuits

Compact silicon nitride interferometers

Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators

Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching

Four-bands high-resolution integrated spectrometer

Silicon nitride TM-pass polarizer using inverse design

Phase errors and statistical analysis of silicon-nitride arrayed waveguide gratings

A SOI Out-of-Plane Electrostatic MEMS Actuator Based on In-Plane Motion

Integrated 1 × 3 MEMS silicon nitride photonics switch

A High-Speed Chip-Scale Rotary Polygon Optical Scanner Based on a Micromotor Integrated With a Micro-Polyhedron Mirror

Ultracompact Silicon-On-Insulator Couplers for Multicore Fibers

Accurate modeling and characterization of photothermal forces in optomechanics

Collaborators (1)

Frederic Nabki

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