Ming Wah Wong
National University of Singapore (NUS)
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Articles (23)
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2025
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2025
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2025
Considering the challenges in reactivity, potential contamination, and substrate selectivity, the ammonolysis of traditional halosilanes in silicon nitride (SiN) thin film processing motivates the exploration of alternative precursors.
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2024
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2024
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2024
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2024
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2024
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2024
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2024
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2024
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2024
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2023
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2023
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2023
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2023
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2023
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2023
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2022
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2022
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2022
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2022
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2022
Collaborators (3)
Paweł Pomastowski
Nicolaus Copernicus University in Toruń
POLAND
Yu Zhao
Associate Professor
National University of Singapore (NUS)
SINGAPORE
Wee Han Ang
Associate Profesor
National University of Singapore (NUS)
SINGAPORE
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