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Taisei Motomura
National Institute of Advanced Industrial Science and Technology
Japan
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Research Interests
Physical Chemistry
20%
Hardware Engineering
10%
Magnetron Sputtering
70%
Thin Film Technology
30%
Plasma Physics
20%
Atomic Layer Deposition
20%
Plasma Processing
20%
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Articles10
Collaborators4
Yuichi Kurashima
National Institute of Advanced Industrial Science and Technology
JAPAN
Hiroshi Yamada
National Institute of Advanced Industrial Science and Technology (AIST)
JAPAN
Nobutomo Morita
National Institute of Advanced Industrial Science and Technology (AIST)
JAPAN
Masato Uehara
Kyushu University
JAPAN
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