Thomas Tillocher

Associate Professor

University of Orléans

France

Research Interests

Explore related searches

Professors in France

Contact this professor

Get a free first email built on one of their papers, ready for you to edit and send yourself.

About

Dr. Thomas Tillocher is an Associate Professor at the University of Orléans, France. His research focuses on advanced etching techniques, including cryogenic cyclical etching and atomic layer etching, particularly involving silicon and gallium nitride materials. Recent publications highlight his work on plasma passivation steps and surface contamination analysis in the context of semiconductor processing.

Articles (8)

Year:

2025

Year:

2024

Year:

2023

Year:

2023

Year:

2022

Year:

2022

Year:

2022

Year:

2021

Collaborators (1)

Remi DUSSART

FRANCE

View details

ApplyKite TwinLearns as you apply

Make your next move.

Prepare your application

Review drafts before you send them.

Thomas Tillocher

Research Interests

Explore related searches

Contact this professor

About

Articles (8)

Cryogenic cyclical etching of Si using CF4 plasma passivation steps: The role of CF radicals

Evaluation of Bosch processing and C4F8 plasma deposition at cryogenic temperatures

Atomic layer etching of gallium nitride using fluorine-based chemistry

Cryogenic etching of silicon compounds using a CHF3 based plasma

Combined analysis methods for investigating titanium and nickel surface contamination after plasma deep etching

Quasi In Situ XPS on a SiOxFy Layer Deposited on Silicon by a Cryogenic Process

Cryogenic nanoscale etching of silicon nitride selectively to silicon by alternating SiF4/O2 and Ar plasmas

Comparison between Bosch and STiGer Processes for Deep Silicon Etching

Collaborators (1)

Remi DUSSART

Make your next move.