Victor Soltwisch

Head of working group EUV-nanometrology

Physikalisch-Technische Bundesanstalt in Berlin

Germany

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Victor Soltwisch is the Head of the working group EUV-nanometrology at the Physikalisch-Technische Bundesanstalt located in Berlin, Germany. His research focuses on advanced techniques in nanometrology, including the characterization of periodic nanostructures and the application of machine learning in X-ray fluorescence spectroscopy. Recent publications highlight his contributions to optical metrology and innovations in instrumentation for nanostructured surfaces.

Articles (14)

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2025

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2025

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2025

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2025

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2025

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2024

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2023

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2022

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2022

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2022

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2022

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2021

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2021

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2020

Collaborators (3)

Christian Gollwitzer

Head of working group 7.21 X-ray radiometry

Physikalisch-Technische Bundesanstalt in Berlin

GERMANY

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Uwe Zeitner

Professor

Munich University of Applied Sciences

GERMANY

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Peter Puschnig

Associate Professor

Karl-Franzens-Universität Graz

AUSTRIA

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Victor Soltwisch

Research Interests

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Articles (14)

Fabrication of shallow EUV gratings on silicon by irradiation with helium ions

Characterization and discrimination of periodic nanostructures with scanning-free GEXRF

Machine Learning‐Accelerated Reconstruction of Periodic Nanostructures with X‐ray Fluorescence Spectroscopy Methods

Instrumentation and uncertainty evaluation for absolute characterization of thin films and nanostructured surfaces in advanced optical metrology

Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays

Quantitative reconstruction of atomic orbital densities of neon from partial cross sections

A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range

Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces

Scan-Free GEXRF in the Soft X-ray Range for the Investigation of Structured Nanosamples

Determination of optical constants of thin films in the EUV

Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning

The anisotropy in the optical constants of quartz crystals for soft X-rays

Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures

Collaborators (3)

Christian Gollwitzer

Uwe Zeitner

Peter Puschnig

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