ANDREW CAVANAGH

University of Colorado Boulder

United States

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Articles (10)

Year:

2025

Year:

2025

Year:

2025

Year:

2024

Year:

2024

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2024

Year:

2023

Year:

2023

Year:

2023

Year:

2022

Collaborators (3)

Taewook Nam

Assistant Professor

Sejong University

SOUTH KOREA

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Andrew Kummel

University of California

UNITED STATES

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Steven M. George

University of Colorado Boulder

UNITED STATES

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ANDREW CAVANAGH

Research Interests

Explore related searches

Contact this professor

Articles (10)

Mechanism of Thermal Atomic Layer Etching of Hafnium Zirconium Oxide, HfO2 and ZrO2 Using Sequential HF and Acetylacetone Exposures

Electron-Enhanced Deposition of Titanium-, Silicon- and Tungsten-Containing Films at Low Temperatures Using Volatile Precursors with Various Reactive Background Gases

Strongly and Weakly Adsorbed H2O Layer Thicknesses on Hydroxylated SiO2 Surfaces versus H2O Pressure at Various Substrate Temperatures

Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions

Removing defects from sputter damage on InGaP surfaces using thermal atomic layer etching

Thermal Atomic Layer Etching of Gold Using Sulfuryl Chloride for Chlorination and Triethylphosphine for Ligand Addition

Electron-enhanced SiO2 atomic layer deposition at 35 °C using disilane and ozone or water as reactants

Thermal Atomic Layer Etching of CoO, ZnO, Fe2O3, and NiO by Chlorination and Ligand Addition Using SO2Cl2 and Tetramethylethylenediamine

Electron-enhanced atomic layer deposition of Ru thin films using Ru(DMBD)(CO)3 and effect of forming gas anneal

Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides

Collaborators (3)

Taewook Nam

Andrew Kummel

Steven M. George

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