Steven M. George

University of Colorado Boulder

United States

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Articles (11)

Year:

2024

Year:

2023

Year:

2023

Year:

2023

Year:

2023

Year:

2023

Year:

2023

Year:

2023

Year:

2022

Year:

2022

Year:

2022

Collaborators (4)

Taewook Nam

Assistant Professor

Sejong University

SOUTH KOREA

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Elena Vaníčková

Brno University of Technology

CZECH REPUBLIC

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ANDREW CAVANAGH

University of Colorado Boulder

UNITED STATES

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VICTOR BRIGHT

University of Colorado Boulder

UNITED STATES

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Steven M. George

Research Interests

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Articles (11)

Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions

Thermal atomic layer etching of VO2 using sequential BCl3 and SF4 exposures: Observation of conversion, ligand-exchange, and oxidation state changes

Thermal atomic layer etching of CoO using acetylacetone and ozone: Evidence for changes in oxidation state and crystal structure during sequential exposures

Thermal Atomic Layer Etching of Zinc Sulfide Using Sequential Trimethylaluminum and Hydrogen Fluoride Exposures: Evidence for a Conversion Mechanism

Electron-enhanced SiO2 atomic layer deposition at 35 °C using disilane and ozone or water as reactants

Area-Selective Atomic Layer Deposition of ZnO on Si\SiO2 Modified with Tris(dimethylamino)methylsilane

Thermal atomic layer etching of cobalt using sulfuryl chloride for chlorination and tetramethylethylenediamine or trimethylphosphine for ligand addition

Thermal Atomic Layer Etching of CoO, ZnO, Fe2O3, and NiO by Chlorination and Ligand Addition Using SO2Cl2 and Tetramethylethylenediamine

Electron-Enhanced Atomic Layer Deposition of Titanium Nitride Films Using an Ammonia Reactive Background Gas

Effectiveness of Different Ligands on Silane Precursors for Ligand Exchange to Etch Metal Fluorides

Thermal Atomic Layer Etching of Al2O3 Using Sequential HF and BCl3 Exposures: Evidence for Combined Ligand-Exchange and Conversion Mechanisms

Collaborators (4)

Taewook Nam

Elena Vaníčková

ANDREW CAVANAGH

VICTOR BRIGHT

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