Flemming Jensen

Technical University of Denmark

Denmark

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Articles (6)

Year:

2023

Year:

2021

Year:

2020

Year:

2020

Year:

2020

Year:

2020

Collaborators (7)

henri jansen

Technical University of Denmark

DENMARK

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Evgeniy Shkondin

Technical University of Denmark

DENMARK

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Chantal Silvestre

Technical University of Denmark

DENMARK

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Anpan Han

Technical University of Denmark

DENMARK

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Ziwei Ouyang

Associate Professor

Technical University of Denmark

DENMARK

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Jörg Hübner

Technical University of Denmark

DENMARK

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Peixiong Shi

Technical University of Denmark

DENMARK

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Flemming Jensen

Research Interests

Contact this professor

Articles (6)

Silicon Power Interposer Technology (PIT) for Integrated Power Converter

Cr and CrOxetching using SF6and O2plasma

On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature

Ultrahigh aspect ratio etching of silicon in SF6-O2 plasma

Fabrication of hollow coaxial Al2O3/ZnAl2O4 high aspect ratio freestanding nanotubes based on the Kirkendall effect

Collaborators (7)

henri jansen

Evgeniy Shkondin

Chantal Silvestre

Anpan Han

Ziwei Ouyang

Jörg Hübner

Peixiong Shi

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