Jörg Hübner

Technical University of Denmark

Denmark

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Articles (5)

Year:

2021

Year:

2021

Year:

2020

Year:

2020

Year:

2020

Collaborators (7)

Flemming Jensen

Technical University of Denmark

DENMARK

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henri jansen

Technical University of Denmark

DENMARK

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Evgeniy Shkondin

Technical University of Denmark

DENMARK

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Chantal Silvestre

Technical University of Denmark

DENMARK

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Ariadni Droumpali

Technical University of Denmark

DENMARK

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Rafael J. Taboryski

Technical University of Denmark

DENMARK

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Peixiong Shi

Technical University of Denmark

DENMARK

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Jörg Hübner

Research Interests

Contact this professor

Articles (5)

Cr and CrOxetching using SF6and O2plasma

Fabrication of microstructured surface topologies for the promotion of marine bacteria biofilm

On the formation of black silicon in SF6-O2 plasma: The clear, oxidize, remove, and etch (CORE) sequence and black silicon on demand

The CORE Sequence: A Nanoscale Fluorocarbon-Free Silicon Plasma Etch Process Based on SF6/O2 Cycles with Excellent 3D Profile Control at Room Temperature

Ultrahigh aspect ratio etching of silicon in SF6-O2 plasma

Collaborators (7)

Flemming Jensen

henri jansen

Evgeniy Shkondin

Chantal Silvestre

Ariadni Droumpali

Rafael J. Taboryski

Peixiong Shi

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