Heta-Elisa Nieminen

University of Helsinki

Finland

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Articles (9)

Year:

2025

Year:

2024

Year:

2024

Year:

2023

Year:

2023

Year:

2022

Year:

2022

Year:

2021

Year:

2020

Collaborators (11)

Timo Hatanpää

University of Helsinki

FINLAND

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Kenichiro Mizohata

University of Helsinki

FINLAND

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Mikko Heikkilä

University of Helsinki

FINLAND

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Joachim Schnadt

Lund University

SWEDEN

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Unni Olsbye

University of Oslo

NORWAY

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Ville Miikkulainen

University lecturer

FINLAND

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Simo Huotari

University of Helsinki

FINLAND

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Mikko Ari Ilmari Kaipio

University of Helsinki

FINLAND

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Matti Putkonen

University of Helsinki

FINLAND

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Samuli Urpelainen

Adjunct Professor

Oulun Yliopisto

FINLAND

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Mikko Ritala

University of Helsinki

FINLAND

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Heta-Elisa Nieminen

Research Interests

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Articles (9)

In Vacuo Studies on the Mechanism of Inherently Area-Selective Atomic Layer Deposition of Iridium

In vacuo studies on reaction mechanisms in ALD processes of ruthenium and platinum films

Ambient pressure x-ray photoelectron spectroscopy study on the initial atomic layer deposition process of platinum

Reductive Thermal Atomic Layer Deposition Process for Gold

In vacuo cluster tool for studying reaction mechanisms in atomic layer deposition and atomic layer etching processes

Ambient pressure x-ray photoelectron spectroscopy setup for synchrotron-based in situ and operando atomic layer deposition research

Reaction mechanism studies on atomic layer deposition process of AlF3

Synchronizing gas injections and time-resolved data acquisition for perturbation-enhanced APXPS experiments

In Situ Reaction Mechanism Study on Atomic Layer Deposition of Intermetallic Co3Sn2 Thin Films

Collaborators (11)

Timo Hatanpää

Kenichiro Mizohata

Mikko Heikkilä

Joachim Schnadt

Unni Olsbye

Ville Miikkulainen

Simo Huotari

Mikko Ari Ilmari Kaipio

Matti Putkonen

Samuli Urpelainen

Mikko Ritala

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