Hyo-Chang Lee

Korea Research Institute of Standards and Science

South Korea

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Articles (10)

Year:

2023

Year:

2023

Year:

2023

Year:

2023

Year:

2023

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2023

Year:

2023

Year:

2023

Year:

2022

Year:

2022

Collaborators (4)

Jong-Ryul Jeong

Professor

Chungbuk National University

SOUTH KOREA

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Young-Gi Kim

Korea Institute of Fusion Energy

SOUTH KOREA

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Jae Wook Lee

Korea Institute of Materials Science

SOUTH KOREA

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chae gwang-seok

Korea Aerospace University

SOUTH KOREA

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Hyo-Chang Lee

Research Interests

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Articles (10)

Plasma low-energy ion flux induced vertical graphene synthesis

Brief Review of Atomic Layer Etching Based on Radiofrequency-Biased Ar/C4F6-Mixture-Based Inductively Coupled Plasma Characteristics

Physiochemical etching characteristics and surface analysis of Y2O3-MgO nanocomposite under different CF4/Ar/O2 plasma atmospheres

Role of Oxygen in Amorphous Carbon Hard Mask Plasma Etching

Effect of impurities in vacuum vessels on the plasma parameters in inductive discharges

Analysis of the transmission spectrum of the microwave cutoff probe influenced by the sheath around the probe

Analysis of the transmission spectrum of the flat-cutoff sensors on wafers with metal layer

Real-time monitoring of the plasma density distribution in low-pressure plasmas using a flat-cutoff array sensor

Database Development of SiO2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe

Effect of electron energy distributions on the electron density in nitrogen inductively coupled plasmas

Collaborators (4)

Jong-Ryul Jeong

Young-Gi Kim

Jae Wook Lee

chae gwang-seok

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