Jae Wook Lee

Korea Institute of Materials Science

South Korea

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Articles (8)

Year:

2025

Year:

2025

Year:

2024

Year:

2024

Year:

2024

Year:

2024

Year:

2024

Year:

2023

Collaborators (2)

Hyo-Chang Lee

Korea Research Institute of Standards and Science

SOUTH KOREA

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Ho Jin Ma

Assistant professor

Kyunghee University

SOUTH KOREA

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Jae Wook Lee

Research Interests

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Articles (8)

Mechanical properties and stability of Si3N4 ceramics treated by hot isostatic pressing

Microstructural evolution and plasma etching resistance of Y2O3-YAM composite layers sinter-bonded on Al2O3 substrate for semiconductor processing equipment

Conversion into single-phase YAG ceramics at low temperature by stoichiometry adjustment

Effect of porosity on etching rate and crater-like microstructure of sintered Al2O3, Y2O3, and YAG ceramics in plasma etching

Plasma etching resistance and mechanical properties of polymorph Gd2O3-MgO nanocomposite with Zr phase stabilizer incorporation

Optimization of a TEOS addition on plasma resistance of YAG ceramics

Optimization of Al-excess nonstoichiometry on the densification and plasma resistance of YAG ceramics

Physiochemical etching characteristics and surface analysis of Y2O3-MgO nanocomposite under different CF4/Ar/O2 plasma atmospheres

Collaborators (2)

Hyo-Chang Lee

Ho Jin Ma

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