Martinez Valérie
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Articles (10)
In this work, optical profilometry and finite-element simulations are applied on buckled micromachined membranes for the stress analysis of ion-beam-sputtered Ta2O5 and SiO2 thin films. Layers with different thicknesses are grown on silicon substrates, and then several membranes with different geometries are manufactured with standard microsystem technologies; due to a high level of films’ compressive stress, buckled membranes are obtained. Thermally grown silica membranes are also produced for comparison. The residual stress values are determined by comparing the measured and simulated deflections of the membranes. The average stress state of Ta2O5 thin films is found to be −209 MPa. The SiO2 thin films are in a higher compressive stress state whose average value is −576 MPa. For comparison, the average stress in thermal SiO2 thin layers grown at 1130°C is found equal to −321 MPa, in good agreement with the literature.
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2023
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2022
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2022
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2022
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2022
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2022
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2022
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2022
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2022
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2022
Collaborators (61)
khun Sang Phukon
University of Birmingham
Federico Pilo
Istituto Nazionale di Fisica Nucleare
Aaron Zimmerman
Assistant Professor
University of Texas at Austin
Wolfango Plastino
Professor of Applied Physics
Roma Tre University
Aaron Jones
University of Western Australia
Ian Harry
Academic, Reader, Reader in Gravitational Wave Astronomy
University of Portsmouth
Isidoro Ferrante
Professore associato
University of Pisa
Alban GASSENQ
Professor associate
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Federico Muciaccia
Sapienza University of Rome
Laura Kate Nuttall
Academic, Reader, Reader in Astrophysics
University of Portsmouth
Alexander Franke
Universität Hamburg
Dan Chen
助教/Assistant Professor
自然科学研究機構国立天文台/National Astronomical Observatory of Japan
Carlos García Núñez
Lecturer Electronics and Nanoscale Engineering
University of Glasgow
Kendall Ackley
University of Warwick
Hong Qi
Lecturer (Assistant Professor)
Queen Mary University of London
Iara Tosta e Melo
Assistant Professor non-tenure (rtda)
University of Catania
Philip Charlton
Charles Sturt University
Andrew Lundgren
Academic, Professor, Professor of Astrophysics
University of Portsmouth
Danièle STEER
Professor
Université Paris Diderot
June Gyu Park
Assistant professor
Yonsei University
Fabio Garufi
Associate Professor
Università degli Studi di Napoli Federico II
Riccardo Maggiore
Institute of Nuclear Physics
Carl Blair
University of Western Australia
N. Shcheblanov
Université Gustave Eiffel
Antonio Marquina
Applied Math Professor
University of Valencia
David Blair
University of Western Australia
Thierry PRADIER
University of Strasbourg
Gungwon Kang
Professor
Chung-Ang University
Fiona Helen Panther
University of Western Australia
Francesca Faedi
Lecturer on Space Economy
University of Leicester
John Veitch
Senior Lecturer
University of Glasgow
Rosa Poggiani
Associate Professor
University of Pisa
Pinchen Fan
Graduate Teaching/Research Assistant
The Pennsylvania State University - University Park Campus
Yoichi Aso
准教授/Associate Professor
自然科学研究機構国立天文台/National Astronomical Observatory of Japan
David Coward
University of Western Australia
Amber Stuver
Associate Professor
Villanova University
Andrei Utina
University of Maastricht
Mateusz Bawaj
Associate professor
University of Perugia
Gideon Koekoek
University of Maastricht
Salvatore Vitale
Assistant Professor
Massachusetts Institute of Technology
Linqing Wen
University of Western Australia
Manoj Kovalam
University of Western Australia
David Tanner
University of Florida
Jan Harms
Professor
Gran Sasso Science Institute
Bhaskar Biswas
Universität Hamburg
Conor Mow-Lowry
University of Amsterdam
Richard O'Shaughnessy
Rochester Institute of Technology
Patricia Schmidt
Associate Professor
University of Birmingham
Michael Pürrer
Adjunct Assistant Professor
University of Rhode Island
Francesco Pannarale
Associate Professor
Sapienza University of Rome
Rodrigo Tenorio
University of the Balearic Islands
Keiko Kokeyama
Associate Professor
Nagoya University
Keith Riles
Professor
University of Michigan
Samuel Patrone
Graduate Teaching Assistant
California Institute of Technology
Chayan Chatterjee
University of Western Australia
Piero Chessa
University of Pisa
Hamid Satari
University of Western Australia
Roberto De Pietri
Associate Professor
Università degli Studi di Pavia
Takuya Kawasaki
Assistant Professor
The Univeristy of Tokyo
Damon Beveridge
University of Western Australia
Paul Hill
University Of Strathclyde
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