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N. Shcheblanov
NetherlandsResearch Interests
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Articles (11)
Year:
2026
Year:
2023
Year:
2023
Year:
2023
Year:
2023
Year:
2023
Year:
2023
In this work, optical profilometry and finite-element simulations are applied on buckled micromachined membranes for the stress analysis of ion-beam-sputtered Ta2O5 and SiO2 thin films. Layers with different thicknesses are grown on silicon substrates, and then several membranes with different geometries are manufactured with standard microsystem technologies; due to a high level of films’ compressive stress, buckled membranes are obtained. Thermally grown silica membranes are also produced for comparison. The residual stress values are determined by comparing the measured and simulated deflections of the membranes. The average stress state of Ta2O5 thin films is found to be −209 MPa. The SiO2 thin films are in a higher compressive stress state whose average value is −576 MPa. For comparison, the average stress in thermal SiO2 thin layers grown at 1130°C is found equal to −321 MPa, in good agreement with the literature.
Year:
2023
Year:
2023
Year:
2023
Year:
2023
Collaborators (41)
khun Sang Phukon
University of Birmingham
Troels Harmark
Københavns Universitet
Steven Penn
Research Professor
Syracuse University
Desmond Gibson
Academic, Professor, Professor
University of the West of Scotland OLD
Alexander Franke
Universität Hamburg
Carlos García Núñez
Lecturer Electronics and Nanoscale Engineering
University of Glasgow
Ben Farr
Assistant Professor
University of Oregon
Zoheyr Doctor
Board of Visitors Research Assistant Professor
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Innocenzo M. Pinto
Professor of Electromagnetis
University of Naples Federico II
Christophe Malhaire
Assistant Professor
Institut des nanotechnologies de Lyon
June Gyu Park
Assistant professor
Yonsei University
Fabio Garufi
Associate Professor
Università degli Studi di Napoli Federico II
Vassiliki Kalogera
Professor
Northwestern University
ESTER RUIZ MORALES
Associate Professor
Universidad Politécnica de Madrid
Antonio Marquina
Applied Math Professor
University of Valencia
Andrea Grimaldi
Københavns Universitet
Gungwon Kang
Professor
Chung-Ang University
Francesca Faedi
Lecturer on Space Economy
University of Leicester
Rosa Poggiani
Associate Professor
University of Pisa
Fausto Acernese
Professore Associato
University of Salerno
Daniel Williams
Research Associate
University of Glasgow
Amber Stuver
Associate Professor
Villanova University
Andrei Utina
University of Maastricht
Maurizio Canepa
University of Genova
Alessandro Parisi
Assistant Professor (RTD-A)
University of Perugia
Jan Harms
Professor
Gran Sasso Science Institute
Archisman Ghosh
Assistant Professor (ZAP docent tenure track)
Ghent University
Charalampos Markakis
Assistant Professor
Stony Brook University
Mikhail Povarnitsyn
Université Gustave Eiffel
Bhaskar Biswas
Universität Hamburg
Conor Mow-Lowry
University of Amsterdam
Martinez Valérie
Université Claude Bernard Lyon 1
Francesco Pannarale
Associate Professor
Sapienza University of Rome
Boris Goncharov
Senior Scientist
Max Planck Institute for Gravitational Physics
M. Leonardi
Associate Professor
McMaster University
Piero Chessa
Ricercatore
University of Perugia
Alex Amato
Assistant Professor
University of Maastricht
Takuya Kawasaki
Assistant Professor
The Univeristy of Tokyo
Simone Dall'osso
Associate Professor
University of Bologna
Cecilio García Quirós
Beatriz de Galindo professor
Universitat de les Illes Balears
Kevin Turbang
University of Antwerp
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