Masato Kiuchi

Specially Appointed Professor

Osaka University

Japan

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About

Masato Kiuchi is a Specially Appointed Professor at Osaka University, Japan. His research areas include chemical vapor deposition processes, ion-beam technology, and photocatalytic activity of nanoparticles. Recent articles authored by Professor Kiuchi address the generation and application of molecular ions, as well as the stability of complex molecules in advanced material processes.

Articles (8)

Year:

2025

Year:

2024

Year:

2022

Year:

2021

Year:

2021

Year:

2020

Year:

2020

Year:

2020

Collaborators (2)

Takae Takeuchi

Associate Professor

Nara Women's University

JAPAN

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Hiroaki Sakurai

National Institute of Advanced Industrial Science and Technology

JAPAN

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Masato Kiuchi

Research Interests

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Articles (8)

Identification of fragments from triethylamine and generation of molecular ions containing carbon and nitrogen

Low-energy N+ ion beam induced chemical vapor deposition using tetraethyl orthosilicate, hexamethyldisiloxane, or hexamethyldigermane

Injection of low-energy SiCH5+ ion-beam to Si substrate during chemical vapor deposition process using methylsilane

Macroaggregation effect of TiO<inf>2</inf>nanoparticles on the photocatalytic activity and post-reaction separation for aqueous degradation of organic compounds

Production of low-energy SiCH<inf>3</inf><sup>+</sup> and SiC<inf>2</inf>H<inf>7</inf><sup>+</sup> ion beams for 3C-SiC film formation by selecting fragment ions from dimethylsilane

Production of low-energy fragment-ion beams from hexamethyldisiloxane and the irradiation of SiO+ ion beam to substrates with supplemental oxygen gas for SiO2 film formation

Stability of hexafluoroacetylacetone molecules on metallic and oxidized nickel surfaces in atomic-layer-etching processes

Suppression of cooking oil deterioration by electromagnetic field with harmonics generated by asymmetric circuit

Collaborators (2)

Takae Takeuchi

Hiroaki Sakurai

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