Romel Hidayat

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Assistant Professor

Sejong University

South Korea

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Chemisorption mechanism study of gas-phase inhibitors for area-selective atomic layer deposition

Open Date: 2022-01-01

Close Date: 2024-01-01

Articles (10)

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2023

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2023

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2023

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2022

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2022

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2022

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2021

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2021

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2021

Year:

2021

Collaborators (4)

Jongwan Jung

Sejong University

SOUTH KOREA

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Soo‐Hyun Kim

SOUTH KOREA

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Won-Jun Lee

Professor

Sejong University

SOUTH KOREA

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Seongjae Cho

Associate Professor

Ewha Womans University

SOUTH KOREA

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Romel Hidayat

Research Interests

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Contact this professor

Recent Grants

Articles (10)

Gas-phase etching mechanism of silicon oxide by a mixture of hydrogen fluoride and ammonium fluoride: A density functional theory study

A theoretical study on the surface reaction of tetrakis(dimethylamino)titanium on titanium oxide

Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study

Erratum: “Density functional theory study on the fluorination reactions of silicon and silicon dioxide surfaces using different fluorine-containing molecules” [J. Vac. Sci. Technol. A 37, 021001 (2019)]

Preparation of tungsten-based thin films using a F-free W precursor and tert-butyl hydrazine via 2- and 3-step atomic layer deposition process

Atomic layer deposition of titanium oxide thin films using a titanium precursor with a linked amido-cyclopentadienyl ligand

Atomic layer deposition of tungsten and tungsten-based compounds using WCl5 and various reactants selected by density functional theory

Density functional theory study on the modification of silicon nitride surface by fluorine-containing molecules

Surface reaction of the hafnium precursor with a linked amido-cyclopentadienyl ligand: A density functional theory study

Density functional theory study on the reducing agents for atomic layer deposition of tungsten using tungsten chloride precursor

Collaborators (4)

Jongwan Jung

Soo‐Hyun Kim

Won-Jun Lee

Seongjae Cho

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