Thi-Thuy-Nga Nguyen

Designated assistant professor

Nagoya University

Japan

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Articles (13)

Year:

2024

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2024

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2024

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2024

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2023

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2023

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2023

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2023

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2022

Year:

2022

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2021

Year:

2021

Year:

2020

Collaborators (3)

Tsutsumi Takayoshi

Nagoya University

JAPAN

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Ngo Van Nong

Full Professor

Nagoya University

JAPAN

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Shih-Nan Hsiao

Prof.

Nagoya University

JAPAN

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Thi-Thuy-Nga Nguyen

Research Interests

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Articles (13)

Nitrogen admixture effects on growth characteristics and properties of carbon nanowalls

Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation

Nonhalogen Dry Etching of Metal Carbide TiAlC by Low-Pressure N2/H2 Plasma at Room Temperature

Surface sulfurization of amorphous carbon films in the chemistry of oxygen plasma added with SO2 or OCS for high-aspect-ratio etching

Bias-supply timing tailored to the aspect ratio dependence of silicon trench etching in Ar plasma with alternately injected C4F8 and SF6

Manipulation of etch selectivity of silicon nitride over silicon dioxide to a-carbon by controlling substate temperature with a CF4/H2 plasma

Etching Mechanism Based on Hydrogen Fluoride Interactions with Hydrogenated SiN Films Using HF/H2 and CF4/H2 Plasmas

Deposition of carbon‐based materials directly on copper foil and nickel foam as 2D‐ and 3D‐networked metal substrates by in‐liquid plasma

Low‐temperature reduction of SnO2 by floating wire‐assisted medium‐pressure H2/Ar plasma

Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma

On the Etching Mechanism of Highly Hydrogenated SiN Films by CF<sub>4</sub>/D<sub>2</sub> Plasma: Comparison with CF<sub>4</sub>/H<sub>2</sub>

Effects of hydrogen content in films on the etching of LPCVD and PECVD SiN films using CF4/H2 plasma at different substrate temperatures

Formation of spherical Sn particles by reducing SnO2 film in floating wire-assisted H2/Ar plasma at atmospheric pressure

Collaborators (3)

Tsutsumi Takayoshi

Ngo Van Nong

Shih-Nan Hsiao

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