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Akiko Hirai

Group Leader

National Institute of Advanced Industrial Science and Technology (AIST)

Japan

Research Interests

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Professors in Japan Professors in Condensed Matter Physics Condensed Matter Physics professors in Japan

Articles (7)

Year:

2026

Year:

2025

Year:

2025

Year:

2025

Year:

2023

Year:

2023

Year:

2023

Collaborators (5)

Yohan Kondo

National Institute of Advanced Industrial Science and Technology (AIST)

JAPAN

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Youichi Bitou

National Institute of Advanced Industrial Science and Technology (AIST)

JAPAN

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Yasuaki Hori

National Institute of Advanced Industrial Science and Technology (AIST)

JAPAN

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Ichiko Misumi

National Institute of Advanced Industrial Science and Technology (AIST)

JAPAN

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Ryosuke Kizu

National Institute of Advanced Industrial Science and Technology (AIST)

JAPAN

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Akiko Hirai

Research Interests

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Articles (7)

Non-contact absolute measurement of curved surface profiles using a scanning deflectometric profiler

Two-point diameter calibration of a sphere by a micro-coordinate measuring machine using a silicon gauge block as a reference standard

Novel analysis of alignment error on spherical Fizeau interferometer and uncertainty evaluation of sphericity calibration system based on random ball test

Distribution measurement of line edge roughness using a noise correction based on height–height correlation function

Effect of white noise on roughness measurements of self-affine fractals

Enhancing the precision of 3D sidewall measurements of photoresist using atomic force microscopy with a tip-tilting technique

Evaluation of the change in photoresist sidewall roughness due to electron beam-induced shrinkage using atomic force microscopy

Collaborators (5)

Yohan Kondo

Youichi Bitou

Yasuaki Hori

Ichiko Misumi

Ryosuke Kizu

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