Katja Sarah Meinel

Chemnitz University of Technology

Germany

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Articles (5)

Year:

2025

Year:

2022

Year:

2021

Year:

2020

Year:

2020

Collaborators (5)

Sven Zimmermann

Chemnitz University of Technology

GERMANY

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Karla Hiller

Chemnitz University of Technology

GERMANY

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Thomas Mussenbrock

Full Professor (W3)

Ruhr-Universität Bochum

GERMANY

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Walter Thomas Otto

Fraunhofer-Institut für Elektronische Nanosysteme ENAS

GERMANY

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Marcel Melzer

Chemnitz University of Technology

GERMANY

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Katja Sarah Meinel

Research Interests

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Contact this professor

Articles (5)

Characterization of the ion angle distribution function in low-pressure plasmas using a micro-electromechanical system

Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors

Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

Collaborators (5)

Sven Zimmermann

Karla Hiller

Thomas Mussenbrock

Walter Thomas Otto

Marcel Melzer

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