Sven Zimmermann

Chemnitz University of Technology

Germany

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Articles (7)

Year:

2025

Year:

2024

Year:

2023

Year:

2022

Year:

2021

Year:

2020

Year:

2020

Collaborators (7)

Danny Reuter

Head of Department

Fraunhofer-Institut für Elektronische Nanosysteme ENAS

GERMANY

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Karla Hiller

Chemnitz University of Technology

GERMANY

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Thomas Mussenbrock

Full Professor (W3)

Ruhr-Universität Bochum

GERMANY

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Alexander Schade

Chemnitz University of Technology

GERMANY

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Katja Sarah Meinel

Chemnitz University of Technology

GERMANY

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Walter Thomas Otto

Fraunhofer-Institut für Elektronische Nanosysteme ENAS

GERMANY

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Marcel Melzer

Chemnitz University of Technology

GERMANY

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Sven Zimmermann

Research Interests

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Contact this professor

Articles (7)

Characterization of the ion angle distribution function in low-pressure plasmas using a micro-electromechanical system

Plastic Waste Recycling─A Chemical Recycling Perspective

Integration of (Poly-Si/Air)<sup>n</sup> Distributed Bragg Reflectors in a 150 mm Bulk Micromachined Wafer-Level MOEMS Fabrication Process

Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors

Piezoelectric Scanning Micromirror With Built-In Sensors Based on Thin Film Aluminum Nitride

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

Collaborators (7)

Danny Reuter

Karla Hiller

Thomas Mussenbrock

Alexander Schade

Katja Sarah Meinel

Walter Thomas Otto

Marcel Melzer

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