Marcel Melzer

Chemnitz University of Technology

Germany

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Articles (6)

Year:

2022

Year:

2021

Year:

2020

Year:

2020

Year:

2020

Year:

2020

Collaborators (4)

Sven Zimmermann

Chemnitz University of Technology

GERMANY

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Karla Hiller

Chemnitz University of Technology

GERMANY

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Katja Sarah Meinel

Chemnitz University of Technology

GERMANY

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Iwona Szymańska

Dr hab. prof. UMK

Nicolaus Copernicus University

POLAND

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Marcel Melzer

Research Interests

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Contact this professor

Articles (6)

Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors

Design and technology for uniform aluminum nitride piezoelectric micromachined ultrasonic transducers with radial array

2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride

On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes

Ruthenium(II) MOCVD Precursors for Phosphorus-Doped Ruthenium Layer Formation

Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride

Collaborators (4)

Sven Zimmermann

Karla Hiller

Katja Sarah Meinel

Iwona Szymańska

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